CSET：2024年追踪极紫外光刻的出现-识别、保护和推广下一代新兴技术的经验教训报告（英文版）

This paper presents a case study on the most important technology to have emerged in the past decade: extreme ultraviolet (EUV) lithography. In 2019, when the first commercial electronics enabled by EUV were released, the technology was hailed as “the machine that saved Moore’s Law.”1 All of today’s most advanced artificial intelligence (AI) chi